DESIGN AND SIMULATION OF HIGH FLOWRATE PIEZOELECTRIC PUMP BASED ON RHOMBIC PIEZOELECTRIC ACTUATOR

This paper utilizes displacement amplifying mechanism and resonance drive to improve the output performance of piezoelectric pump. A rhombic piezoelectric actuator is designed and simulated with a piezoelectric stack (10 mmx10 mmx18.2 mm) and a rhombic displacement amplifying mechanism. Modal analyses of the rhombic piezoelectric actuator are carried out under fixed-vibrating constraint and symmetric constraint. The simulation results show that the resonant frequencies of the actuator in bending vibrating mode under fixed-vibrating and symmetric constraints are 724.6 Hz and 3205.9 Hz respectively. Then piezoelectric pumps are designed with two types of rhombic piezoelectric actuators vibrating two diaphragm pumps simultaneously in a symmetric structure. High flowrates output of the presented piezoelectric pumps design can be expected.