Lateral-deflection-controlled friction force microscopy

被引：2
|
作者：
Fukuzawa, Kenji [1 ]
Hamaoka, Satoshi [1 ]
Shikida, Mitsuhiro [1 ]
Itoh, Shintaro [1 ]
Zhang, Hedong [2 ]
机构：
[1] Nagoya Univ, Dept Micro Nano Syst Engn, Chikusa Ku, Nagoya, Aichi 4648603, Japan
[2] Nagoya Univ, Dept Complex Syst Sci, Chikusa Ku, Nagoya, Aichi 4648603, Japan
来源：
JOURNAL OF APPLIED PHYSICS | 2014年 / 116卷 / 08期
基金：
日本科学技术振兴机构;
关键词：
MICROMECHANICAL PROBE; CANTILEVER;
D O I：
10.1063/1.4894250
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Lateral-deflection-controlled dual-axis friction force microscopy (FFM) is presented. In this method, an electrostatic force generated with a probe-incorporated micro-actuator compensates for friction force in real time during probe scanning using feedback control. This equivalently large rigidity can eliminate apparent boundary width and lateral snap-in, which are caused by lateral probe deflection. The method can evolve FFM as a method for quantifying local frictional properties on the micro/nanometer-scale by overcoming essential problems to dual-axis FFM. (c) 2014 AIP Publishing LLC.
引用
收藏
页数：6
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