Lateral force microscopy using cantilevers with integrated Wheatstone bridge piezoresistive deflection sensor

被引：0
|
作者：
Gotszalk, T [1 ]
Rangelow, IW [1 ]
Dumania, P [1 ]
Grabiec, P [1 ]
机构：
[1] WROCLAW TECH UNIV,INST ELECT TECHNOL,PL-50372 WROCLAW,POLAND
来源：
MICROLITHOGRAPHY AND METROLOGY IN MICROMACHINING II | 1996年 / 2880卷
关键词：
scanning probe microscopy; atomic force microscopy; piezoresistive effect;
D O I：
暂无
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
引用
收藏
页码：256 / 263
页数：8
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