Lateral-deflection-controlled friction force microscopy

被引：2

作者：

Fukuzawa, Kenji ^{[1
]}

Hamaoka, Satoshi ^{[1
]}

Shikida, Mitsuhiro ^{[1
]}

Itoh, Shintaro ^{[1
]}

Zhang, Hedong ^{[2
]}

机构：

[1] Nagoya Univ, Dept Micro Nano Syst Engn, Chikusa Ku, Nagoya, Aichi 4648603, Japan

[2] Nagoya Univ, Dept Complex Syst Sci, Chikusa Ku, Nagoya, Aichi 4648603, Japan

来源：

JOURNAL OF APPLIED PHYSICS | 2014年 / 116卷 / 08期

基金：

日本科学技术振兴机构;

关键词：

MICROMECHANICAL PROBE; CANTILEVER;

D O I：

10.1063/1.4894250

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Lateral-deflection-controlled dual-axis friction force microscopy (FFM) is presented. In this method, an electrostatic force generated with a probe-incorporated micro-actuator compensates for friction force in real time during probe scanning using feedback control. This equivalently large rigidity can eliminate apparent boundary width and lateral snap-in, which are caused by lateral probe deflection. The method can evolve FFM as a method for quantifying local frictional properties on the micro/nanometer-scale by overcoming essential problems to dual-axis FFM. (c) 2014 AIP Publishing LLC.

引用

页数：6

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