Alternative method of wavelength drift free dual-wavelength heterodyne interferometry for the absolute distance measurement

被引:0
|
作者
Chen, Kun-Huang [1 ]
Chen, Jing-Heng [2 ]
Wu, Chi-Chang [1 ]
Chang, Wei-Yao [1 ]
机构
[1] Feng Chia Univ, Dept Elect Engn, Taichung 40724, Taiwan
[2] Feng Chia Univ, Dept Photon, Taichung 40724, Taiwan
关键词
heterodyne interferometry; absolute distance; dual-wavelength; phase difference; LASER;
D O I
10.1007/s10043-009-0096-2
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
Based on the technique of dual-wavelength and principle of heterodyne interferometry, a modified method for measuring the absolute distance is proposed. Because two test lights suffer from the same influence of wavelength drift in the measurement setup, the minus effect coming from the wavelength drift can be offset. Therefore, the measurement accuracy can be significantly increased. The feasibility of this method was demonstrated with a measurement resolution of about 1.50 mu m. This method provides the advantages of a simple optical setup, easy operation and rapid measurement.
引用
收藏
页码:492 / 494
页数:3
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