Long Range, High accuracy Absolute Distance Measurement by Improved Three-Wavelength Heterodyne Interferometry

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作者
Huang, Pei-Chi [1 ]
Yang, Shang-Da [1 ]
机构
[1] Natl Tsing Hua Univ, Inst Photon Technol, Hsinchu 30013, Taiwan
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中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The complexity and non-ambiguity range (NAR) of the conventional three-wavelength heterodyne interferometry are improved by using one phase modulator and a mapping procedure, respectively. Experiments demonstrated 10-mm NAR and an estimated accuracy of 0.65 nm.
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页数:2
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