Design and calibration method for microvision three-dimensional laser scanner

被引：4
|
作者：
Sun, Changku [1 ]
Liu, Bin [1 ]
Wang, Peng [1 ]
机构：
[1] Tianjin Univ, State Key Lab Precis Measuring Technol & Instrume, Tianjin 300072, Peoples R China
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2009年 / 27卷 / 03期
关键词：
calibration; micro-optics; optical scanners; CAMERA;
D O I：
10.1116/1.3081982
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A microvision three-dimensional (3D) laser scanner with micron accuracy and the calibration method are presented in this article. The system is designed to measure and reconstruct the 3D shape of miniature objects. A new two-step calibration method is proposed to reduce measurement errors and improve the measurement precision. Repeated measurements show that the repeatability is better than +/- 1 mu m. Moreover, the system has been successfully applied to extracting the height of solder pastes, which is beneficial in surface mount technology quality control.
引用
收藏
页码：1315 / 1318
页数：4
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