Design and calibration method for microvision three-dimensional laser scanner

被引：4

作者：

Sun, Changku ^{[1
]}

Liu, Bin ^{[1
]}

Wang, Peng ^{[1
]}

机构：

[1] Tianjin Univ, State Key Lab Precis Measuring Technol & Instrume, Tianjin 300072, Peoples R China

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2009年 / 27卷 / 03期

关键词：

calibration; micro-optics; optical scanners; CAMERA;

D O I：

10.1116/1.3081982

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

A microvision three-dimensional (3D) laser scanner with micron accuracy and the calibration method are presented in this article. The system is designed to measure and reconstruct the 3D shape of miniature objects. A new two-step calibration method is proposed to reduce measurement errors and improve the measurement precision. Repeated measurements show that the repeatability is better than +/- 1 mu m. Moreover, the system has been successfully applied to extracting the height of solder pastes, which is beneficial in surface mount technology quality control.

引用

页码：1315 / 1318

页数：4

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