Effects of plasma pre-treatment on surface properties of fabric sputtered with copper

被引:8
|
作者
Meng, Lingling [1 ]
Wei, Qufu [2 ]
Li, Yueli [3 ]
Xu, Wenzheng [2 ]
机构
[1] Yancheng Inst Technol, Yancheng, Peoples R China
[2] Jiangnan Univ, Minist Educ, Key Lab Ecotext, Wuxi, Peoples R China
[3] Yancheng Text Vocat Technol Coll, Yancheng, Peoples R China
关键词
DC magnetron sputtering; Copper film; Electrical; Oxygen gas plasma; Tensile; ZNO THIN-FILMS; ROOM-TEMPERATURE; OPTICAL-PROPERTIES; DEPOSITION; TRANSPARENT;
D O I
10.1108/IJCST-06-2012-0028
中图分类号
TB3 [工程材料学]; TS1 [纺织工业、染整工业];
学科分类号
0805 ; 080502 ; 0821 ;
摘要
Purpose - In this study, the polyester fabrics were treated with low temperature plasma before Cu sputtering. The effect of oxygen gas plasma pre-treatment on the surface structures, electrical properties, and mechanical properties of samples was investigated. The paper aims to discuss these issues. Design/methodology/approach - A laboratory direct current (DC) magnetron sputter coating system was used to deposit the nanoscale copper (Cu) films onto the surface of polyester plain fabric at room temperature. Findings - The crystal structure of the sputtered copper films did not show any obvious change on the Os-plasma-treated fabric, but the surface roughness and surface particle size increased significantly. Improvement in electrical properties of copper films was closely related to the deposition time. The tensile test results indicated that the mechanical properties of the plasma-treated polyester fabrics were also improved after copper coating. Originality/value - The research reports on the functional textiles, and the experiment results and analysis are original. There is a great potential to commercialize such functional textiles.
引用
收藏
页码:96 / 104
页数:9
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