Optical emission spectroscopy for diagnosis of diamond growth and etching processes in microwave plasma

被引：1
|
作者：
Yurov, V. Yu. [1 ,2 ]
Bushuev, E. V. [1 ]
Bolshakov, A. P. [1 ,2 ,3 ]
Antonova, I. A. [1 ,2 ]
Ralchenko, V. G. [1 ,2 ,3 ]
Konov, V. I. [1 ,2 ]
机构：
[1] RAS, Gen Phys Inst, Moscow 119991, Russia
[2] Natl Res Nucl Univ MEPhI, Moscow 115409, Russia
[3] Harbin Inst Technol, Harbin 150001, Heilongjiang, Peoples R China
来源：
10TH INTERNATIONAL WORKSHOP 2017 STRONG MICROWAVES AND TERAHERTZ WAVES: SOURCES AND APPLICATIONS | 2017年 / 149卷
基金：
俄罗斯科学基金会;
关键词：
SINGLE-CRYSTAL DIAMOND; TEMPERATURE; DEPOSITION; DENSITY;
D O I：
10.1051/epjconf/201714902013
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页数：2
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