Tribological properties in a high vacuum of carbon films containing titanium prepared by magnetron sputtering

被引：0

作者：

Sasaki, M ^{[1
]}

Kozukue, Y ^{[1
]}

Hashimoto, K ^{[1
]}

Takayama, K ^{[1
]}

Nakamura, I ^{[1
]}

Takano, I ^{[1
]}

Sawada, Y ^{[1
]}

机构：

[1] Kogakuin Univ, Dept Elect Engn, Tokyo 1920015, Japan

来源：

VACUUM | 2004年 / 74卷 / 3-4期

关键词：

tribology; high vacuum; carbon film; TiC film; sputtering;

D O I：

10.1016/j.vacuum.2004.01.011

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Carbon films containing titanium on a stainless-steel substrate were prepared using two magnetron sputtering sources with a target of titanium and carbon. These prepared films were analyzed by X-ray photoelectron spectroscopy to determine the chemical state and the atomic composition, and by Raman spectroscopy and by X-ray diffraction to define the film microstructure. The tribological properties were measured by a tribo-tester of a pin-on-disk type in a high vacuum chamber. The wear surface was observed by a scanning laser microscope and a scanning electron microscope. The friction coefficients of TixC1-x films measured in an air atmosphere showed lower values than those measured in a high vacuum, because oxygen and moisture contained in air played the role of lubricants. The carbon film with a small dose of titanium showed the minimum value on abrasion quantity of the film worn in a high vacuum. (C) 2004 Elsevier Ltd. All rights reserved.

引用

页码：455 / 459

页数：5

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