Investigation of defects in sputtered W/B4C multilayers

被引：3
|
作者：
Jiang, Hui [1 ]
Yan, Shuai [1 ]
Zhu, Jingtao [2 ]
Dong, Zhaohui [1 ]
Zheng, Yi [1 ]
He, Yumei [1 ]
Li, Aiguo [1 ]
机构：
[1] Chinese Acad Sci, Shanghai Inst Appl Phys, Shanghai Synchrotron Radiat Facil, Shanghai 201204, Peoples R China
[2] Tongji Univ, Inst Precis Opt Engn, Minist Educ, Key Lab Adv Microstruct Mat, Shanghai 200092, Peoples R China
来源：
APPLIED SURFACE SCIENCE | 2015年 / 357卷
基金：
中国国家自然科学基金;
关键词：
Multilayer; Oxidation; Stress; Defect; ATOMIC-FORCE MICROSCOPY; OPTICAL APPLICATIONS; DIFFUSE-SCATTERING; TUNGSTEN-OXIDE; THIN-FILMS; COATINGS; REFLECTIVITY; INTERFACE; CRACKING; STRESS;
D O I：
10.1016/j.apsusc.2015.09.161
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Sputtered W/B4C multilayers were determined by X-ray photoelectron spectroscopy, Raman scattering spectroscopy, scanning electron microscopy and atomic force microscopy synthetically. Two defect modes were observed in multilayers: buckle delamination and oxidation. This paper compares the chemical composition varies along multilayer depth and at different regions and tries to interpret the mechanism of defect evolution. The X-ray grazing incidence reflection profiles were compared to the theoretical value to estimate the influences from different defects. (C) 2015 Elsevier B.V. All rights reserved.
引用
收藏
页码：1180 / 1186
页数：7
相关论文
共 50 条
  • [41] Abrasion of Steel by Ceramic Coatings: Comparison of RF-DLC to Sputtered B4C
    Stephen J. Harris
    Gordon G. Krauss
    Steven J. Simko
    Timothy J. Potter
    Robert W. Carpick
    Bridget Welbes
    Martin Grischke
    Tribology Letters, 2002, 12 : 43 - 50
  • [42] Effect of B4C diffusion barriers on the thermal stability of Sc/Si periodic multilayers
    Jonnard, Philippe
    Maury, Helene
    Le Guen, Karine
    Andre, Jean-Michel
    Mahne, Nicola
    Giglia, Angelo
    Nannarone, Stefano
    Bridou, Francoise
    SURFACE SCIENCE, 2010, 604 (11-12) : 1015 - 1021
  • [43] Effect on Microstructure and Performance of B4C Content in B4C/Cu Composite
    Shu, Dayu
    Li, Xiuqing
    Yang, Qingxia
    METALS, 2021, 11 (08)
  • [44] Abrasion of steel by ceramic coatings:: Comparison of RF-DLC to sputtered B4C
    Harris, SJ
    Krauss, GG
    Simko, SJ
    Potter, TJ
    Carpick, RW
    Welbes, B
    Grischke, M
    TRIBOLOGY LETTERS, 2002, 12 (01) : 43 - 50
  • [45] Microstructural investigation on B4C/Al-7093 composite
    Hu, HM
    Lavernia, EJ
    Harrigan, WC
    Kajuch, J
    Nutt, SR
    MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 2001, 297 (1-2): : 94 - 104
  • [46] Structural modifications in Pd/B4C multilayers for X-ray optical applications
    Morawe, Ch
    Supruangnet, R.
    Peffen, J-Ch.
    THIN SOLID FILMS, 2015, 588 : 1 - 10
  • [47] Formation of short-period multilayer W/B4C compositions
    Kopylets, I. A.
    Kondratenko, V. V.
    Zubarev, E. N.
    Roshchupkin, D. V.
    TECHNICAL PHYSICS, 2012, 57 (12) : 1709 - 1715
  • [48] Formation of short-period multilayer W/B4C compositions
    I. A. Kopylets
    V. V. Kondratenko
    E. N. Zubarev
    D. V. Roshchupkin
    Technical Physics, 2012, 57 : 1709 - 1715
  • [49] Evaluation of microstructure and residual stress in W/B4C multilayer optics
    Majhi, A.
    Dilliwar, M.
    Pradhan, P. C.
    Jena, S.
    Nayak, M.
    Singh, M. N.
    Udupa, D. V.
    Sahoo, N. K.
    JOURNAL OF APPLIED PHYSICS, 2018, 124 (11)
  • [50] Thermodynamic modeling and investigation of the oxygen effect on the sintering of B4C
    Asadikiya, Mohammad
    Rudolf, Christopher
    Zhang, Cheng
    Boesl, Benjamin
    Agarwal, Arvind
    Zhong, Yu
    JOURNAL OF ALLOYS AND COMPOUNDS, 2017, 699 : 1022 - 1029
12345