Preferred orientation and hardness enhancement of TiN/CrN superlattice coatings deposited by reactive magnetron sputtering

被引：90
|
作者：
Yang, Q
He, C
Zhao, LR
Immarigeon, JP
机构：
[1] Natl Res Council Canada, Struct Mat & Prop Lab, Inst Aerosp Res, Ottawa, ON K1A 0R6, Canada
[2] Nortel Networks, Dept C115 3500, Nepean, ON K2H 8E9, Canada
来源：
SCRIPTA MATERIALIA | 2002年 / 46卷 / 04期
关键词：
superlattice; coatings; sputtering; hardness; preferred orientation;
D O I：
10.1016/S1359-6462(01)01241-6
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
TiN/CrN superlattice coatings with various bilayer periods are deposited by reactive magnetron sputtering. The preferred orientations of the superlattices can be controlled through selecting either (200)-oriented TiN or (111)-oriented CrN as the starting layer for deposition. Changing the preferred orientation from (111) to (200) can significantly increase hardness enhancements. (C) 2002 Acta Materialia Inc. Published by Elsevier Science Ltd. All rights reserved.
引用
收藏
页码：293 / 297
页数：5
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