Multiprobe scanning probe microscope using a probe-array head

被引：0
|
作者：
Sun, Fengming [1 ]
Zhu, Zhenyu [2 ]
Ma, Long [1 ]
机构：
[1] Civil Aviat Univ China, Sino European Inst Aviat Engn, Tianjin 300300, Peoples R China
[2] Changcheng Inst Metrol & Measurement, Beijing 100095, Peoples R China
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 2020年 / 91卷 / 12期
关键词：
ATOMIC-FORCE MICROSCOPE; SENSORS;
D O I：
10.1063/5.0015897
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
We have developed a microelectromechanical system (MEMS)-based multiprobe scanning probe microscope (SPM) to improve imaging efficiency. The SPM head contains seven identical MEMS probes, and each of them integrates a displacement sensor and a Z-axis actuator. Force constant mode is designed based on the force feedback strategy rather than on the position feedback strategy for this kind of SPM head. A nano-measuring machine is equipped with the lateral XY scanners, which can reach a motion range of 25 mm x 25 mm. After calibration, the measurement of one-dimensional grating has been made to demonstrate the capability of multiprobe scanning.
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页数：9
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