Multiprobe scanning probe microscope using a probe-array head

被引：0

作者：

Sun, Fengming ^{[1
]}

Zhu, Zhenyu ^{[2
]}

Ma, Long ^{[1
]}

机构：

[1] Civil Aviat Univ China, Sino European Inst Aviat Engn, Tianjin 300300, Peoples R China

[2] Changcheng Inst Metrol & Measurement, Beijing 100095, Peoples R China

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2020年 / 91卷 / 12期

关键词：

ATOMIC-FORCE MICROSCOPE; SENSORS;

D O I：

10.1063/5.0015897

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We have developed a microelectromechanical system (MEMS)-based multiprobe scanning probe microscope (SPM) to improve imaging efficiency. The SPM head contains seven identical MEMS probes, and each of them integrates a displacement sensor and a Z-axis actuator. Force constant mode is designed based on the force feedback strategy rather than on the position feedback strategy for this kind of SPM head. A nano-measuring machine is equipped with the lateral XY scanners, which can reach a motion range of 25 mm x 25 mm. After calibration, the measurement of one-dimensional grating has been made to demonstrate the capability of multiprobe scanning.

引用

页数：9

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