共 50 条
- [1] STUDYING EXTREME ULTRAVIOLET WAVE TRANSIENTS WITH A DIGITAL LABORATORY: DIRECT COMPARISON OF EXTREME ULTRAVIOLET WAVE OBSERVATIONS TO GLOBAL MAGNETOHYDRODYNAMIC SIMULATIONS ASTROPHYSICAL JOURNAL, 2011, 728 (01):
- [2] Characterization of extreme ultraviolet masks by extreme ultraviolet scatterometry JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2004, 22 (06): : 3059 - 3062
- [3] Estimation of extreme ultraviolet power and throughput for extreme ultraviolet lithography Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 2001, 40 (07): : 4535 - 4539
- [4] Estimation of extreme ultraviolet power and throughput for extreme ultraviolet lithography JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2001, 40 (07): : 4535 - 4539
- [5] Extreme Ultraviolet Mask Defect Observation Using an Extreme Ultraviolet Microscope PHOTOMASK TECHNOLOGY 2013, 2013, 8880