Confocal microscope for 3D surface topography based on laser array

被引：0
|
作者：
Huang, XD [1 ]
Tan, JB [1 ]
机构：
[1] Harbin Inst Technol, Inst Ultra Precis Opt & Elect Instrument Engn, Harbin 150001, Heilongjiang, Peoples R China
来源：
PROCEEDINGS OF THE THIRD INTERNATIONAL SYMPOSIUM ON INSTRUMENTATION SCIENCE AND TECHNOLOGY, VOL 2 | 2004年
关键词：
point-array scanning; three dimension detecting; intensity distribution confocal;
D O I：
暂无
中图分类号：
TP31 [计算机软件];
学科分类号：
081202 ; 0835 ;
摘要：
To meet the demand of fast measurement based on confocal microscope, a novel method of the laser-array of 3D surface topography is proposed in this paper, and the principle modeling has been built up. Linear array laser is employed in 3D surface scanning. Firstly, the distribution of the 3D light field was analyzed based on diffraction optic theory under off-axis point illumination, the principle formula of light intensity distributing was given in detecting space. The different point light sources effect was discussed under the oblique parallel light condition. The simulation result showed that the method of the linear array laser structure confocal microscope has the ability of the fast 3D surface topography under paraxial approximation condition.
引用
收藏
页码：1309 / 1313
页数：5
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