Confocal microscope for 3D surface topography based on laser array

To meet the demand of fast measurement based on confocal microscope, a novel method of the laser-array of 3D surface topography is proposed in this paper, and the principle modeling has been built up. Linear array laser is employed in 3D surface scanning. Firstly, the distribution of the 3D light field was analyzed based on diffraction optic theory under off-axis point illumination, the principle formula of light intensity distributing was given in detecting space. The different point light sources effect was discussed under the oblique parallel light condition. The simulation result showed that the method of the linear array laser structure confocal microscope has the ability of the fast 3D surface topography under paraxial approximation condition.