The effect of additives on the adsorption properties of porous silicon

被引：48
|
作者：
OHalloran, GM [1 ]
Kuhl, M [1 ]
Trimp, PJ [1 ]
French, PJ [1 ]
机构：
[1] TU CHEMNITZ ZWICKAU,DEPT ELECT ENGN,D-09126 CHEMNITZ,GERMANY
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 1997年 / 61卷 / 1-3期
关键词：
porous silicon; additives; surfactants; adsorption; humidity sensing;
D O I：
10.1016/S0924-4247(97)80298-1
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Porous silicon is used as a dielectric layer in a capacitive humidity sensor. The addition of a commercial surfactant to the electrolyte during porous silicon formation has been found to affect significantly the adsorption properties of the layer, resulting in a much increased sensitivity and response speed. The structure of the formed porous layer is examined and compared with those formed using HF alone and a standard surfactant.
引用
收藏
页码：415 / 420
页数：6
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