Observation of an inductively coupled RF discharge with one-turn internal antenna

被引：3

作者：

Cicman, P ^{[1
]}

Fujita, H ^{[1
]}

机构：

[1] Saga Univ, Dept Elect & Elect Engn, Saga 8408502, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2002年 / 41卷 / 5A期

关键词：

ICP; RF potentials; EVDF; high energy electrons; antenna coil;

D O I：

10.1143/JJAP.41.3114

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Inductively coupled plasma (ICP) has been studied in a low-pressure argon gas (5 mTorr) by measuring radio frequency (RF) potential oscillation with an emissive probe and two-dimensional electron velocity distribution functions (EVDFs) with a directional analyzer. The ICP discharge was realized with one-turn antenna coil using a simple model for understanding its fundamental characteristics. The amplitude of RF potential oscillation decreased as the input power was increased leading to a mode conversion from capacitively coupled plasma (CCP) to ICP discharge. The two-dimensional EVDFs measurement suggests that the observed high energy electrons are radiated from the antenna coil.

引用

页码：3114 / 3119

页数：6

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