Observation of an inductively coupled RF discharge with one-turn internal antenna

被引：3
|
作者：
Cicman, P [1 ]
Fujita, H [1 ]
机构：
[1] Saga Univ, Dept Elect & Elect Engn, Saga 8408502, Japan
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2002年 / 41卷 / 5A期
关键词：
ICP; RF potentials; EVDF; high energy electrons; antenna coil;
D O I：
10.1143/JJAP.41.3114
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Inductively coupled plasma (ICP) has been studied in a low-pressure argon gas (5 mTorr) by measuring radio frequency (RF) potential oscillation with an emissive probe and two-dimensional electron velocity distribution functions (EVDFs) with a directional analyzer. The ICP discharge was realized with one-turn antenna coil using a simple model for understanding its fundamental characteristics. The amplitude of RF potential oscillation decreased as the input power was increased leading to a mode conversion from capacitively coupled plasma (CCP) to ICP discharge. The two-dimensional EVDFs measurement suggests that the observed high energy electrons are radiated from the antenna coil.
引用
收藏
页码：3114 / 3119
页数：6
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