Effect of the substrate temperature on the properties of spray-deposited SnO2:F thin films

被引：10

作者：

Tang, Ping ^{[1
]}

Qiu, Chuankai ^{[1
]}

He, Jingjing ^{[1
]}

Zhang, Tiejun ^{[1
]}

Feng, Xiao ^{[1
]}

Luo, Xiangang ^{[1
]}

机构：

[1] Chinese Acad Sci, Inst Opt & Elect, State Key Lab Opt Technol Nanofabricat & Microeng, Chengdu 610209, Peoples R China

来源：

JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS | 2014年 / 25卷 / 10期

关键词：

F-DOPED SNO2; CHEMICAL-VAPOR-DEPOSITION; PULSED-LASER DEPOSITION; SOLAR-CELLS; OXIDE-FILMS; PYROLYSIS; FLUORINE; GROWTH; FTO;

D O I：

10.1007/s10854-014-2175-9

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The effect of the substrate temperature on the properties of spray-deposited SnO2:F thin films is investigated. X-ray diffraction patterns show that the crystallinity of the films is enhanced with the increasing of substrate temperature. Comparing the SEM images, both the particle size and density are increased at a higher deposition temperature. The lowest sheet resistance of 8.43 Omega/a- is obtained at the substrate temperature of 350 A degrees C. In addition, the average optical transmittance of the three films reaches up to 85 % in the visible range. The absorption coefficient is the lowest at 350 A degrees C. The band gap increases from 3.36 to 3.61 eV while the electrical resistivity of SnO2:F thin films decreases from 8.51 x 10(-3) to 9.86 x 10(-4) Omega cm as elevating the substrate temperature from 250 to 350 A degrees C.

引用

页码：4369 / 4374

页数：6

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