Defects in nonpolar (13(4)over-bar0) ZnO epitaxial film grown on (114) LaAlO3 substrate

被引：1
|
作者：
Yen, Tzu-Chun [1 ]
Wang, Wei-Lin [1 ]
Peng, Chun-Yen [1 ]
Tian, Jr-Sheng [1 ]
Ho, Yen-Teng [1 ]
Chang, Li [1 ]
机构：
[1] Natl Chiao Tung Univ, Dept Mat Sci & Engn, Hsinchu 30010, Taiwan
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 2014年 / 32卷 / 02期
关键词：
Aluminum compounds - Heterojunctions - Stacking faults - Dislocations (crystals) - II-VI semiconductors - Epitaxial growth - High resolution transmission electron microscopy - Zinc oxide;
D O I：
10.1116/1.4830275
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
The defects in (13 (4) over bar0)ZnO epitaxial film grown on (114)LaAlO3 (LAO) have been systematically investigated by using transmission electron microscopy. At the ZnO/LAO interface, the Burgers vectors of misfit dislocations are identified to be 1/3[(1) over bar2 (1) over bar0] and 1/2[0001]. Threading dislocations with the Burgers vectors of 1/3 < 11 (2) over bar0 > and < 0001 > are distributed on the basal plane. In (13 (4) over bar0)ZnO film, the predominant planar defects are basal stacking faults (BSFs) with 1/6 < 20 (2) over bar3 > displacement vectors. The densities of dislocations and BSFs are about 3.8 x 10(10) cm(-2) and 3.1 x 10(5) cm(-1), respectively. (C) 2014 American Vacuum Society.
引用
收藏
页数：3
相关论文
共 50 条
  • [1] Single domain nonpolar (13(4)over-bar-0) ZnO on (114) LaAlO3
    Ho, Yen-Teng
    Wang, Wei-Lin
    Peng, Chun-Yen
    Tian, Jr-Sheng
    Sen Shih, Yi
    Yen, Tzu-Chen
    Chang, Li
    PHYSICA STATUS SOLIDI-RAPID RESEARCH LETTERS, 2012, 6 (03): : 114 - 116
  • [2] Band alignment of nonpolar (10(1)over-bar0) ZnO on (112) LaAlO3
    Wang, Jianli
    Chen, Xinfeng
    Zhang, Aixia
    Bai, Dongmei
    Tang, Gang
    Zhang, Junting
    Stampfl, C.
    SOLID STATE COMMUNICATIONS, 2019, 287 : 23 - 26
  • [3] Growth of nonpolar (11(2)over-bar0) ZnO films on LaAlO3 (001) substrates
    Ho, Yen-Teng
    Wang, Wei-Lin
    Peng, Chun-Yen
    Liang, Mei-Hui
    Tian, Jr-Sheng
    Lin, Chih-Wei
    Chang, Li
    APPLIED PHYSICS LETTERS, 2008, 93 (12)
  • [4] Stability and band offsets of nonpolar (11(2)over-bar0) ZnO on (001) LaAlO3
    Wang, Jianli
    Chen, Xinfeng
    Wu, Shuyin
    Bai, Dongmei
    Tang, Gang
    Zhang, Junting
    Stampfl, Catherine
    VACUUM, 2018, 150 : 29 - 34
  • [5] Defects in m-plane ZnO epitaxial films grown on (112) LaAlO3 substrate
    Wang, Wei-Lin
    Peng, Chun-Yen
    Ho, Yen-Teng
    Chuang, Shu-Chang
    Chang, Li
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2011, 29 (03):
  • [6] The role of the interface structure on the growth of nonpolar (10(1)over-bar0) and semipolar (11(2)over-bar(2)over-bar) ZnO on (112) LaAlO3 substrates
    Tian, Jr-Sheng
    Wu, Yue-Han
    Wang, Wei-Lin
    Yen, Tzu-Chun
    Ho, Yen-Teng
    Chang, Li
    MATERIALS LETTERS, 2013, 109 : 237 - 239
  • [7] Structural property of m-plane ZnO epitaxial film grown on LaAlO3 (112) substrate
    Wang, Wei-Lin
    Ho, Yen-Teng
    Chiu, Kun-An
    Peng, Chun-Yen
    Chang, Li
    JOURNAL OF CRYSTAL GROWTH, 2010, 312 (08) : 1179 - 1182
  • [8] Schottky diode with Ag on (11(2)over-bar0) epitaxial ZnO film
    Sheng, H
    Muthukumar, S
    Emanetoglu, NW
    Lu, Y
    APPLIED PHYSICS LETTERS, 2002, 80 (12) : 2132 - 2134
  • [9] Epitaxial Zintl aluminide SrAl4 grown on a LaAlO3 substrate
    Schlipf, Lukas
    Slepko, Alexander
    Posadas, Agham B.
    Seinige, Heidi
    Dhamdhere, Ajit
    Tsoi, Maxim
    Smith, David J.
    Demkov, Alexander A.
    PHYSICAL REVIEW B, 2013, 88 (04):
  • [10] Single domain non-polar (12(3)over-bar0)ZnO epitaxy on (118)LaAlO3 by pulsed laser deposition
    Yen, Tzu-Chun
    Ho, Yen-Teng
    Peng, Chun-Yen
    Tian, Jr-Sheng
    Shih, Yi-Sen
    Wei, Lin-Lung
    Wang, Wei-Lin
    Chiu, Kun-An
    Chang, Li
    THIN SOLID FILMS, 2016, 618 : 114 - 117
12345