Application of scanning deep level transient spectroscopy for characterisation of multicrystalline silicon

被引:3
|
作者
Knobloch, K
Seifert, W
Kittler, M
机构
[1] Inst. Semiconduct. Phys. Frankfurt, D-15230 Frankfurt (Oder)
关键词
silicon; solar cell process; spectroscopy;
D O I
10.1016/S0921-5107(96)01717-5
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Minority carrier trap levels in cast p-type multicrystalline silicon solar cell material were identified by means of scanning deep level transient spectroscopy. The material was investigated in the as-grown state and after the solar cell process. Additionally iron diffused samples (1050 degrees C), quenched or slow-cooled, were used. Two levels in the as-grown material were detected at E(C)-0.2 eV and E(C)-0.45 eV. The E(C)-0.45 eV level is also found with comparable defect density in the material after the solar cell process and after iron diffusion, respectively. In the quenched samples the iron-boron level at E(C)-0.29 eV is observed. Spatially resolved measurements for the E(C)-0.45 eV level reveal an inhomogeneous defect distribution in the iron diffused and quenched samples which is not related to crystal defects like grain boundaries or dislocations.
引用
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页码:254 / 259
页数:6
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