Grazing-incidence small-angle X-ray scattering applied to the characterization of aggregates in surface regions

被引：55

作者：

Naudon, A

Babonneau, D

Thiaudière, D

Lequien, S

机构：

[1] Univ Poitiers, Met Phys Lab, UMR 6630 CNRS, UFR Sci, F-86962 Futuroscope Chasseneuil, France

[2] European Synchrotron Radiat Facil, F-38043 Grenoble, France

[3] CEA Saclay, CEA CNRS, Lab Pierre Sue, F-91191 Gif Sur Yvette, France

来源：

PHYSICA B | 2000年 / 283卷 / 1-3期

关键词：

grazing incidence; X-ray scattering; thin film growth; ion assistance;

D O I：

10.1016/S0921-4526(99)01894-3

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

Ion-beam sputtering deposition has been used to elaborate discontinuous gold and granular carbon-platinum thin films. The morphology of the deposited gold islands and buried platinum clusters so obtained has been studied by grazing incidence small-angle X-ray scattering (GISAXS). The full potentiality of this non-destructive technique at grazing incidence is obtained when it is coupled with a synchrotron radiation beam and two-dimensional detectors. The influence of argon ion-implantation performed during Au or C-Pt growth has been studied. A relevant information to understand and control the structural properties of such materials is then achieved. (C) 2000 Elsevier Science B.V. All rights reserved.

引用

页码：69 / 74

页数：6

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