Flexible Fabrication of Flexible Electronics: A General Laser Ablation Strategy for Robust Large-Area Copper-Based Electronics

被引:40
|
作者
Qin, Ruzhan [2 ]
Hu, Mingjun [1 ]
Zhang, Naibai [3 ]
Guo, Zhongyue [4 ]
Yan, Ze [2 ]
Li, Jiebo [4 ]
Liu, Jinzhang [1 ]
Shan, Guangcun [2 ]
Yang, Jun [5 ]
机构
[1] Beihang Univ, Sch Mat Sci & Engn, Beijing 100191, Peoples R China
[2] Beihang Univ, Sch Instrumentat Sci & Optoelect Engn, Beijing 100191, Peoples R China
[3] Elect Technol Grp Corp, Res Inst 54, Beijing Res & Dev Ctr, Beijing 100070, Peoples R China
[4] Beihang Univ, Sch Biol Sci & Med Engn, Beijing Adv Innovat Ctr Biomed Engn, Beijing 100191, Peoples R China
[5] Chinese Acad Sci, Beijing Inst Nanoenergy & Nanosyst, Beijing 100083, Peoples R China
来源
ADVANCED ELECTRONIC MATERIALS | 2019年 / 5卷 / 10期
基金
中国国家自然科学基金;
关键词
EMI shielding; flexible circuit boards; flexible transparent electrodes; laser ablation; wearable electronics; TRANSPARENT ELECTRODES; NANOWIRE NETWORKS; FILM; CONDUCTIVITY; PULSE;
D O I
10.1002/aelm.201900365
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Attributed to high power density and controllable digital program operation, lasers are a powerful tool in the preparation, prototype fabrication, and post-processing of materials. In this paper, a general laser ablation strategy that can be conducted under ambient, room-temperature, and mask-free conditions is employed for the rapid fabrication of robust large-area copper-based flexible electronics. Micrometer-scale thick copper layer cladded on flexible polymer substrate can be removed efficiently in one laser scanning pass based on laser-induced heat evaporation effect. Metal grids with a width less than 10 microns and a thickness close to 2 microns can be produced in a reliable manner. As proof-of-concept demonstrations, flexible transparent conducting electrodes and a variety of flexible circuit boards (FCBs) with different precisions and dimensions are fabricated by this approach in a digitally controlled mode and their photoelectric properties under normal and deformation states are investigated. The results indicate that the method is robust and as-prepared flexible electrodes and circuits are reliable and endurable, indicative of the potential of this method in scalable fabrication of sub-millimeter flexible electronics through a straightforward and flexible fashion.
引用
收藏
页数:10
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