Microsystems metrology

被引：0
|
作者：
Hasche, K [1 ]
Wilkening, G [1 ]
机构：
[1] Phys Tech Bundesanstalt, D-38116 Braunschweig, Germany
来源：
TECHNISCHES MESSEN | 1999年 / 66卷 / 12期
关键词：
D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：475 / 475
页数：1
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