MICROSYSTEMS FOR ELECTRICAL AC VOLTAGE METROLOGY

In the framework of developing MEMS devices to fabricate AC voltage references for electrical metrology and high precision instrumentation, several first devices have been designed and fabricated using a Silicon On Insulator (SOI) Surface Micromachining process. The measured MEMS AC voltage reference values have been found to be from 5 V to 100 V in a good agreement with the calculated values performed with Coventor and Comsol finite elements software. Second set of devices with improved characteristics has also been fabricated. The stability of the MEMS out-put voltage at 100 kHz has been found very promising for the best samples where the relative deviation from the mean value over almost 12 hours showed a standard deviation of about 6.3 ppm.