Experimental adaptation of model parameters for microelectromechanical systems (MEMS)

With the use of simulation tools it is possible to predict the mechanical behaviour of micromechanical devices. However, there often are some differences between theoretical and experimental results characterizing the behaviour. Some problems of experimental analysis of capacitively operated coupled mass-spring oscillators, of setting up a suitable model and experimental identification of unknown or erroneous model parameters are discussed in this paper. The measurement of transfer functions and an adaptation method for model parameters are explained for cells of a capacitive micromechanical array. A more accurate simulation of the behaviour is possible using such an improved model. (C) 1997 Elsevier Science S.A.