[1] Harbin Inst Technol, Ctr Composite Mat & Struct, Harbin 150080, Peoples R China
[2] Nagoya Univ, Dept Elect Engn & Comp Sci, Chikusa Ku, Nagoya, Aichi 4648603, Japan
[3] Nagoya Univ, Inst Mat & Syst Sustainabil, Chikusa Ku, Nagoya, Aichi 4648603, Japan
[4] NISRI, Dept Res, Chikusa Ku, Nagoya, Aichi 4640819, Japan
[5] Minist Educ, Key Lab Micro Syst & Micro Stuctu, Harbin 150080, Peoples R China
[6] Shihezi Univ, Dept Appl Phys, Shihezi 832003, Peoples R China