Fabrication of high-aspect-ratio microscale mold inserts by parallel μEDM

被引：24
|
作者：
Cao, D. M. [1 ]
Jiang, J. [1 ]
Yang, R. [1 ]
Meng, W. J. [1 ]
机构：
[1] Louisiana State Univ, Dept Mech Engn, Baton Rouge, LA 70803 USA
来源：
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2006年 / 12卷 / 09期
关键词：
D O I：
10.1007/s00542-006-0131-1
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
The micro-electrical-discharge-machining (mu EDM) technique is an alternative to LiGA (Lithographic, Galvanoformung, Abformung) for fabricating metal-based high-aspect-ratio microscale structures (HARMS). Traditional mu EDM is a serial subtractive machining technique in which cuts are performed sequentially, and is therefore difficult to use for generating complex micropatterns on surfaces. In this paper, we report results of a hybrid microfabrication approach, combining micropattern definition with LiGA fabricated Ni HARMS with parallel micropattern generation with mu EDM. Multiple micropatterns with some geometrical complexity were successfully generated in parallel on elemental Ta and 304 stainless steel. The hybrid LiGA/ parallel-mu EDM strategy offers a credible alternative to conventional LiGA regarding fabrication of meso- and micro- scale mold inserts, and enables them to be fabricated out of high-temperature metals/alloys not achievable with electrodeposition.
引用
收藏
页码：839 / 845
页数：7
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