Fine finishing of ground DOE lens of synthetic silica by magnetic field-assisted polishing

被引：20

作者：

Suzuki, H. ^{[1
,3
]}

Okada, M. ^{[1
]}

Lin, W. ^{[2
,3
]}

Morita, S. ^{[3
]}

Yamagata, Y. ^{[3
]}

Hanada, H. ^{[4
]}

Araki, H. ^{[4
]}

Kashima, S. ^{[4
]}

机构：

[1] Chubu Univ, Dept Mech Engn, Kasugai, Aichi 487, Japan

[2] Gunma Univ, Dept Mech Engn, Ota, Gunma, Japan

[3] RIKEN, Wako, Saitama, Japan

[4] Natl Inst Nat Sci, Natl Astron Observ Japan, Mitaka, Tokyo, Japan

来源：

CIRP ANNALS-MANUFACTURING TECHNOLOGY | 2014年 / 63卷 / 01期

关键词：

Grinding; Polishing; DOE lens;

D O I：

10.1016/j.cirp.2014.03.027

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Needs of micro structured optical components are increasing in the astronomical space telescope. In the space having extremely large temperature differences, a diffractive optical element (DOE) lens is very effective in reducing the thermal chromatic aberration due to the thermal expansion. In order to finish the ground DOE lens of synthetic silica, a magnetic field-assisted polishing is proposed. In the experiments, DOE lens ground by the sharp edged diamond wheel is finished by the magnetic field-assisted polishing. By the grinding and polishing test, changes of form deviation profiles and surface roughness profiles are evaluated and feasibility is tested. (C) 2014 CIRP.

引用

页码：313 / 316

页数：4

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