Fine finishing of ground DOE lens of synthetic silica by magnetic field-assisted polishing

被引:20
|
作者
Suzuki, H. [1 ,3 ]
Okada, M. [1 ]
Lin, W. [2 ,3 ]
Morita, S. [3 ]
Yamagata, Y. [3 ]
Hanada, H. [4 ]
Araki, H. [4 ]
Kashima, S. [4 ]
机构
[1] Chubu Univ, Dept Mech Engn, Kasugai, Aichi 487, Japan
[2] Gunma Univ, Dept Mech Engn, Ota, Gunma, Japan
[3] RIKEN, Wako, Saitama, Japan
[4] Natl Inst Nat Sci, Natl Astron Observ Japan, Mitaka, Tokyo, Japan
关键词
Grinding; Polishing; DOE lens;
D O I
10.1016/j.cirp.2014.03.027
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Needs of micro structured optical components are increasing in the astronomical space telescope. In the space having extremely large temperature differences, a diffractive optical element (DOE) lens is very effective in reducing the thermal chromatic aberration due to the thermal expansion. In order to finish the ground DOE lens of synthetic silica, a magnetic field-assisted polishing is proposed. In the experiments, DOE lens ground by the sharp edged diamond wheel is finished by the magnetic field-assisted polishing. By the grinding and polishing test, changes of form deviation profiles and surface roughness profiles are evaluated and feasibility is tested. (C) 2014 CIRP.
引用
收藏
页码:313 / 316
页数:4
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