Enhanced production of electron cyclotron resonance plasma by exciting selective microwave mode on a large-bore electron cyclotron resonance ion source with permanent magnet

被引：3

作者：

Kimura, Daiju ^{[1
]}

Kurisu, Yosuke ^{[1
]}

Nozaki, Dai ^{[1
]}

Yano, Keisuke ^{[1
]}

Imai, Youta ^{[1
]}

Kumakura, Sho ^{[1
]}

Sato, Fuminobu ^{[1
]}

Kato, Yushi ^{[1
]}

Iida, Toshiyuki ^{[1
]}

机构：

[1] Osaka Univ, Grad Sch Engn, Div Elect Elect & Informat Engn, Suita, Osaka 5650871, Japan

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2014年 / 85卷 / 02期

关键词：

D O I：

10.1063/1.4832068

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We are constructing a tandem type ECRIS. The first stage is large-bore with cylindrically comb-shaped magnet. We optimize the ion beam current and ion saturation current by a mobile plate tuner. They change by the position of the plate tuner for 2.45 GHz, 11-13 GHz, and multi-frequencies. The peak positions of them are close to the position where the microwave mode forms standing wave between the plate tuner and the extractor. The absorbed powers are estimated for each mode. We show a new guiding principle, which the number of efficient microwave mode should be selected to fit to that of multipole of the comb-shaped magnets. We obtained the excitation of the selective modes using new mobile plate tuner to enhance ECR efficiency. (C) 2013 AIP Publishing LLC.

引用

页数：3

共 50 条

[1] Production of electron cyclotron resonance plasma by using multifrequencies microwaves and active beam profile control on a large bore electron cyclotron resonance ion source with permanent magnets
Kato, Yushi
Watanabe, Takeyoshi
Matsui, Yuuki
Hirai, Yoshiaki
Kutsumi, Osamu
Sakamoto, Naoki
Sato, Fuminobu
Iida, Toshiyuki
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 2010, 81 (02):
[2] Plasma studies of the permanent magnet electron cyclotron resonance ion source at Peking University
Ren, H. T.
Peng, S. X.
Xu, Y.
Zhao, J.
Lu, P. N.
Chen, J.
Zhang, A. L.
Zhang, T.
Guo, Z. Y.
Chen, J. E.
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 2014, 85 (02):
[3] Enhanced confinement in electron cyclotron resonance ion source plasma
Schachter, L.
Stiebing, K. E.
Dobrescu, S.
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 2010, 81 (02):
[4] Upgrade of the extraction system of permanent magnet electron cyclotron resonance ion source
Zhang, M.
Peng, S. X.
Ren, H. T.
Song, Z. Z.
Yuan, Z. X.
Zhou, Q. F.
Lu, P. N.
Xu, R.
Zhao, J.
Yu, J. X.
Chen, J. E.
Guo, Z. Y.
Lu, Y. R.
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 2010, 81 (02):
[5] CHARACTERIZATION OF A PERMANENT-MAGNET ELECTRON-CYCLOTRON RESONANCE PLASMA SOURCE
MANTEI, TD
DHOLE, S
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (01): : 26 - 28
[6] An all permanent magnet electron cyclotron resonance ion source for heavy ion therapy
Cao, Yun
Li, Jia Qing
Sun, Liang Ting
Zhang, Xue Zhen
Feng, Yu Cheng
Wang, Hui
Ma, Bao Hua
Li, Xi Xia
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 2014, 85 (02):
[7] CU DEPOSITION USING A PERMANENT-MAGNET ELECTRON-CYCLOTRON-RESONANCE MICROWAVE PLASMA SOURCE
BERRY, LA
GORBATKIN, SM
RHOADES, RL
[J]. THIN SOLID FILMS, 1994, 253 (1-2) : 382 - 385
[8] COMPACT ELECTRON-CYCLOTRON-RESONANCE ION-SOURCE WITH A PERMANENT-MAGNET
SHIMADA, M
TORII, Y
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1993, 11 (04): : 1313 - 1316
[9] Stability study of all-permanent-magnet electron cyclotron resonance ion source
Yoshida, K.
Nara, T.
Saitoh, Y.
Yokota, W.
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 2010, 81 (02):
[10] PERFORMANCE AND MODELING OF A PERMANENT-MAGNET ELECTRON-CYCLOTRON-RESONANCE PLASMA SOURCE
SAPROO, A
MANTEI, TD
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1995, 13 (03): : 883 - 886

← 1 2 3 4 5 →