Fatigue test of Al-3% using axial loading testing machine for MEMS materials

被引：0

作者：

Park, Jun-Hyub ^{[1
]}

Choa, Sung-Hoon ^{[1
]}

Choi, Hyeon Chang ^{[1
]}

Myung, Man Sik ^{[1
]}

Lee, Chang Seung ^{[1
]}

Kim, Yun-Jae ^{[1
]}

机构：

[1] Tongmyong Univ Informat Technol, Pusan, South Korea

来源：

Advances in Electronic Packaging 2005, Pts A-C | 2005年

关键词：

D O I：

10.1115/IPACK2005-73195

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

This paper presents high cycle fatigue properties of an Al-3%Ti thin film, used in a RF (radio-frequency) MEMS switch for a mobile phone. The thickness and width of the thin film of specimen are 1.1 mu m and 480 mu m, respectively. Tensile tests of five specimens are performed, from which the ultimate strength is found to be 144MPa. High cycle fatigue tests of six specimens are also performed, from which the fatigue strength coefficient and the fatigue strength exponent are found to be 336MPa and -0.1514, respectively.

引用

页码：1725 / 1730

页数：6

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