Gallium nitride nanowire probe for near-field scanning microwave microscopy

被引：17
|
作者：
Weber, J. C. [1 ,2 ]
Blanchard, P. T. [1 ]
Sanders, A. W. [1 ]
Imtiaz, A. [1 ]
Wallis, T. M. [1 ]
Coakley, K. J. [1 ]
Bertness, K. A. [1 ]
Kabos, P. [1 ]
Sanford, N. A. [1 ]
Bright, V. M. [2 ]
机构：
[1] NIST, Boulder, CO 80305 USA
[2] Univ Colorado, Boulder, CO 80303 USA
来源：
APPLIED PHYSICS LETTERS | 2014年 / 104卷 / 02期
关键词：
ATOMIC-FORCE MICROSCOPY; CATALYST-FREE GROWTH; GAN NANOWIRES; ELECTRICAL CHARACTERIZATION; EVANESCENT MICROWAVES; NUCLEATION; GHZ;
D O I：
10.1063/1.4861862
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
We report on the fabrication of a GaN nanowire probe for near-field scanning microwave microscopy. A single nanowire was Pt-bonded to a commercial Si cantilever prior to evaporation of a Ti/Al coating to provide a microwave signal pathway. Testing over a microcapacitor calibration sample shows the probe to have capacitance resolution of at least 0.7 fF with improved sensitivity and reduced uncertainty compared with a commercial microwave probe. High wear resistance of the defect-free nanowire enabled it to maintain a tip radius of 150 nm after multiple contact-mode scans while demonstrating nanometer-scale topographical resolution. (C) 2014 AIP Publishing LLC.
引用
收藏
页数：4
相关论文
共 50 条
  • [31] Quantitative Error Analysis in Near-Field Scanning Microwave Microscopy
    Haddadi, Kamel
    Polovodov, Petr
    Theron, Didier
    Dambrine, Gilles
    2018 INTERNATIONAL CONFERENCE ON MANIPULATION, AUTOMATION AND ROBOTICS AT SMALL SCALES (MARSS), 2018,
  • [32] Interferometric Technique for Scanning Near-field Microwave Microscopy Applications
    Bakli, H.
    Haddadi, K.
    Lasri, T.
    2013 IEEE INTERNATIONAL INSTRUMENTATION AND MEASUREMENT TECHNOLOGY CONFERENCE (I2MTC), 2013, : 1694 - 1698
  • [33] Near-Field Scanning Microwave Microscopy in the Single Photon Regime
    Geaney, S.
    Cox, D.
    Honigl-Decrinis, T.
    Shaikhaidarov, R.
    Kubatkin, S. E.
    Lindstrom, T.
    Danilov, A., V
    de Graaf, S. E.
    SCIENTIFIC REPORTS, 2019, 9 (1)
  • [34] Near-field scanning optical microscopy of indium gallium nitride multiple-quantum-well laser diodes
    Young, DK
    Mack, MP
    Abare, AC
    Hansen, M
    Coldren, LA
    Denbaars, SP
    Hu, EL
    Awschalom, DD
    APPLIED PHYSICS LETTERS, 1999, 74 (16) : 2349 - 2351
  • [35] Narrow Resonant Double-Ridged Rectangular Waveguide Probe for Near-Field Scanning Microwave Microscopy
    Kim, Byung-Mun
    Son, Hyeok-Woo
    Cho, Young-Ki
    JOURNAL OF ELECTRICAL ENGINEERING & TECHNOLOGY, 2018, 13 (01) : 406 - 412
  • [36] Quantitative Theory for Probe-Sample Interaction With Inhomogeneous Perturbation in Near-Field Scanning Microwave Microscopy
    Wei, Zhun
    Cui, Yong-Tao
    Ma, Eric Yue
    Johnston, Scott
    Yang, Yongliang
    Chen, Rui
    Kelly, Michael
    Shen, Zhi-Xun
    Chen, Xudong
    IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 2016, 64 (05) : 1402 - 1408
  • [37] Instrumentation for dual-probe scanning near-field optical microscopy
    Kaneta, A.
    Fujimoto, R.
    Hashimoto, T.
    Nishimura, K.
    Funato, M.
    Kawakami, Y.
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2012, 83 (08):
  • [38] A MICROPIPETTE FORCE PROBE SUITABLE FOR NEAR-FIELD SCANNING OPTICAL MICROSCOPY
    SHALOM, S
    LIEBERMAN, K
    LEWIS, A
    COHEN, SR
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1992, 63 (09): : 4061 - 4065
  • [39] DETECTION OF PROBE DITHER MOTION IN NEAR-FIELD SCANNING OPTICAL MICROSCOPY
    FROEHLICH, FF
    MILSTER, TD
    APPLIED OPTICS, 1995, 34 (31): : 7273 - 7279
  • [40] Simulation of electromagnetic field distribution at a nanowire probe for near field scanning optical microscopy
    Malcolm, Nathan P.
    Heltzel, Alex J.
    Shi, Li
    Howell, John R.
    PROCEEDINGS OF THE MICRO/NANOSCALE HEAT TRANSFER INTERNATIONAL CONFERENCE 2008, PTS A AND B, 2008, : 1309 - 1312
12345