A flexure-based Electromagnetic Linear Actuator for nano-positioning

被引：0
|
作者：
Teo, T. J. [1 ]
Chen, I. -M. [1 ]
Yang, G. L. [2 ]
Lin, W. [2 ]
机构：
[1] Nanyang Technol Univ, Sch Mech & Aerosp Engn, Singapore, Singapore
[2] Singapore Inst Mfg Technol, Singapore, Singapore
来源：
ROMANSY 16: ROBOT DESIGN, DYNAMICS , AND CONTROL | 2006年 / 487卷
关键词：
D O I：
暂无
中图分类号：
TP24 [机器人技术];
学科分类号：
080202 ; 1405 ;
摘要：
In this paper, a novel nano-positioning actuator with large travelling range and large thrust force has been proposed, designed and developed. Known as a Flexure-Based Electromagnetic Linear Actuator (FELA), it consists of two main elements, i.e., an Electromagnetic Driving Mechanism (EDM) and a Flexure-Based Mechanism (FBM). In this FELA, its EDM is developed through a new dual magnet configuration that delivers large force sensitivity and good-to-size ratio. Its actuating body is supported through flexure-based bearings and form a FBM, which ensure its positioning repeatability. A bistable mechanism design has been adopted by this FBM to deliver low stiffness in the actuating direction and high stiffness in rest of the non-actuating directions. Lastly, a prototype of the FELA has been developed and preliminary experiments have been conducted to evaluate its performances.
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页码：371 / +
页数：2
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