Design and Analysis of an In-Plane Flexure XYZ Micro/Nano-Positioning Stage

被引：0

作者：

Zhang, Xiaozhi ^{[1
]}

Xu, Qingsong ^{[1
]}

机构：

[1] Univ Macau, Dept Electromech Engn, Fac Sci & Technol, Ave Univ, Taipa, Macau, Peoples R China

来源：

IEEE ICARM 2016 - 2016 INTERNATIONAL CONFERENCE ON ADVANCED ROBOTICS AND MECHATRONICS (ICARM) | 2016年

关键词：

PARALLEL; SYSTEM;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports on a conceptual design for a modular XYZ micro/nano-positioning stage by employing bridge amplified flexure mechanism and piezoelectric actuators. The mechanism design and analysis of a new terse parallel flexure stage with three translational degrees-of-freedom (DOF) is presented. The FEA simulation of dynamics analysis and fatigue analysis are conducted to reveal the capacity of the stage. Due to a larger enlargement ratio of the amplifier of bridge type and prismatic joints with good decoupling property, the XYZ micro/nano-positioning stage exhibits a large almost-decoupled motion along three working axes. Moreover, the application of modular design reduces the cost for repair and replacing. The capacities of the reported design are validated by performing simulation study.

引用

页码：359 / 363

页数：5

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