A flat type touch probe sensor using PZT thin film vibrator

被引：0
|
作者：
Kurosawa, MK [1 ]
Higuchi, T [1 ]
Kanda, T [1 ]
Morita, T [1 ]
机构：
[1] Univ Tokyo, Grad Sch Engn, Dept Precis Machinery Engn, Bunkyo Ku, Tokyo 1138656, Japan
来源：
PRECISION ENGINEERING, NANOTECHNOLOGY, VOL. 2 | 1999年
关键词：
D O I：
暂无
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
We have fabricated a touch probe sensor, which has a flat configuration and using PZT thin film vibrator. This sensor is for high-precision surface shape measuring, for example, SPM. The sensor consists of a oscillator vibrating in the longitudinal direction. The vibration was exited and detected by a hydrothermaly deposited PZT thin film device. The length of the vibrator was 9.8 mm, and its resonance frequency was 304.35 kHz. The sensitivity and the resolution were evaluated by experiments. The vertical resolution was estimated to be 2.4 nm.
引用
收藏
页码：176 / 179
页数：4
相关论文
共 50 条
  • [41] Basic consideration of a flat-type acceleration sensor utilizing the resonance frequency shift in the flexural vibrator
    Takahashi, Jun
    Sugawara, Sumio
    Terada, Jiro
    Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers, 2003, 42 (5 B): : 3124 - 3129
  • [42] Basic consideration of a flat-type acceleration sensor utilizing the resonance frequency shift in the flexural vibrator
    Takahashi, J
    Sugawara, S
    Terada, J
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2003, 42 (5B): : 3124 - 3129
  • [43] Hybrid-type temperature sensor using thin-film transistors
    Kimura, Mutsumi
    Mukuda, Tomonori
    Matsuda, Tokiyoshi
    Hiroshima, Yasushi
    Digest of Technical Papers - SID International Symposium, 2014, 45 (01): : 952 - 955
  • [44] Hybrid-Type Temperature Sensor Using Thin-Film Transistors
    Kimura, Mutsumi
    Kojima, Kazuki
    Mukuda, Tomonori
    Kito, Katsuya
    Hayashi, Hisashi
    Matsuda, Tokiyoshi
    Hiroshima, Yasushi
    Miyasaka, Mitsutoshi
    IEEE JOURNAL OF THE ELECTRON DEVICES SOCIETY, 2014, 2 (06): : 182 - 186
  • [45] Ultrasonic phased-array sensor using PZT thin film and three-dimensional object detection using BBD
    Yamashita, K
    Murakami, H
    Okuyama, M
    Tanaka, T
    Mo, Y
    Tsuchitani, A
    Suzuki, Y
    Arita, S
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2003, 42 : S1108 - S1112
  • [46] Development of water immerse type ultrasound probe with PZT film deposited by hydrothermal method
    Katsura, N
    Ishikawa, M
    Sato, T
    Takeuchi, M
    Kawashima, N
    Kurosawa, M
    Takeuchi, S
    2003 IEEE ULTRASONICS SYMPOSIUM PROCEEDINGS, VOLS 1 AND 2, 2003, : 1300 - 1305
  • [47] MICRO CORIOLIS MASS FLOW SENSOR DRIVEN BY INTEGRATED PZT THIN FILM ACTUATORS
    Zeng, Y.
    Groenesteijn, I.
    Alveringh, D.
    Steenwelle, R. J. A.
    Ma, K.
    Wiegerink, R. J.
    Lotters, J. C.
    2018 IEEE MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2018, : 850 - 853
  • [48] Spalling technology of PZT thin film capacitor using internal stress
    Sueshige, K. (sueshige.kazutaka@su.t.u-tokyo.ac.jp), 1600, Institute of Electrical Engineers of Japan (134):
  • [49] MFMIS structure for nonvolatile ferroelectric memory using PZT thin film
    Kawasaki, T
    Akiyama, Y
    Fujita, S
    Satoh, S
    IEICE TRANSACTIONS ON ELECTRONICS, 1998, E81C (04) : 584 - 589
  • [50] Reflection-type continuously-tunable phase shifter using PZT thin-film capacitors
    Judy, D. C.
    Qiu, J. X.
    Pulskamp, J. S.
    Polcawich, G.
    Kaul, R.
    ELECTRONICS LETTERS, 2009, 45 (03) : 171 - 173
12345