Basic consideration of a flat-type acceleration sensor utilizing the resonance frequency shift in the flexural vibrator

被引：0

作者：

Takahashi, Jun ^{[1
]}

Sugawara, Sumio ^{[1
]}

Terada, Jiro ^{[2
]}

机构：

[1] Faculty of Science and Engineering, Ishinomaki Senshu University, 1 Shinmito, Mimamisakai, Ishinomaki-shi 986-8580, Japan

[2] Material and Process Laboratory, Matsushita Elec. Components Co., Ltd, 1006 Kadoma, Kadoma-shi 571-0050, Japan

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2003年 / 42卷 / 5 B期

关键词：

Acceleration - Finite element method - Natural frequencies - Vibrations (mechanical) - Vibrators;

D O I：

10.1143/jjap.42.3124

中图分类号：

学科分类号：

摘要：

In this paper, a flat-type structure for the acceleration sensor utilizing the resonance frequency shift in the flexural vibrator is proposed, and the design guideline considering the influence of support is clarified by the finite-element analysis. The resonance frequency shift in the vibrator is produced by axial force due to acceleration. The resonance frequency and quality factor are negligibly influenced by adding support and also by adding mass, because the displacements at both ends of the vibrator are very small. The relationship between the acceleration and the resonance frequency change becomes linear. The influence of the undesirable acceleration from other axes is also analyzed. It was clarified that high sensitivity and reduction of the undesirable acceleration are realized by adding mass and by devising a support. This new structure is expected to be a small low-cost crystal sensor that can be fabricated by mass production.

引用

页码：3124 / 3129

共 9 条

[1] Basic consideration of a flat-type acceleration sensor utilizing the resonance frequency shift in the flexural vibrator
Takahashi, J
Sugawara, S
Terada, J
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2003, 42 (5B): : 3124 - 3129
[2] Experimental consideration of acceleration sensor utilizing resonance frequency change of flexural vibrator
Takahashi, J
Sugawara, S
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2004, 43 (5B): : 3035 - 3039
[3] Experimental consideration of acceleration sensor utilizing resonance frequency change of flexural vibrator
Takahashi, J., 1600, Japan Society of Applied Physics (43):
[4] Equivalent circuit consideration of frequency-shift-type acceleration sensor
Sasaki, Yoshifumi
Sugawara, Sumio
Kudo, Subaru
JAPANESE JOURNAL OF APPLIED PHYSICS, 2018, 57 (07)
[5] Mechanism of flexural resonance frequency shift of a piezoelectric microcantilever sensor during humidity detection
Zhu, Qing
Shih, Wan Y.
Shih, Wei-Heng
APPLIED PHYSICS LETTERS, 2008, 92 (18) : 74
[6] Mechanism of the flexural resonance frequency shift of a piezoelectric microcantilever sensor in a dc bias electric field
Zhu, Qing
Shih, Wan Y.
Shih, Wei-Heng
APPLIED PHYSICS LETTERS, 2008, 92 (03)
[7] Study on a resonance type micro acceleration sensor (1st Report) - Design and the basic evaluation with the 20-times enlarged model
Sato, Takeo
Sangawa, Ushio
Kusukawa, Kazuhiro
Kawata, Koichi
Seimitsu Kogaku Kaishi, 2008, 10 (1051-1055): : 1051 - 1055
[8] Mechanism of flexural resonance frequency shift of a piezoelectric microcantilever sensor during humidity detection [Appl. Phys. Lett. 92, 183505 (2008)]
Wang, Fei
Chen, Jiaying
Zhao, Xuezeng
APPLIED PHYSICS LETTERS, 2008, 93 (09)
[9] 'Mechanism of flexural resonance frequency shift of a piezoelectric microcantilever sensor during humidity detection' [Appl. Phys. Lett. 93, 096101 (2008)] - In Reply
Shih, Wan Y.
Shih, Wei-Heng
APPLIED PHYSICS LETTERS, 2008, 93 (09)

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