Optimization of A Novel Micro-hotplate for Gas Sensor

被引：0
|
作者：
Li, Changchun
Zhang, Xiaobo [1 ]
Liu, Li [1 ]
机构：
[1] Jilin Univ, Coll Phys, State Key Lab Superhard Mat, Changchun 130012, Peoples R China
来源：
APPLIED MATERIALS AND TECHNOLOGIES FOR MODERN MANUFACTURING, PTS 1-4 | 2013年 / 423-426卷
关键词：
micro-hotplate; Finite element analysis; MEMS; temperature distributing; magnetic field distribution;
D O I：
10.4028/www.scientific.net/AMM.423-426.2317
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
A novel design of micro-hotplate is proposed for micro-structural gas sensor. The simulation results of ANSYS reveal that higher temperature and more uniform temperature distribution was achieved in the micro-hotplate when the thickness of SiO2, thickness of Si substrate, electrode width and electrode space were designed to be 100, 200, 20 and 230 mu m, respectively. The new micro-hotplate is benefit for the improvement of sensor sensitivity.
引用
收藏
页码：2317 / +
页数：3
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