Micromachined PMN-PT Single Crystal Composite Transducers-15-75 MHz PC-MUT

被引：27
|
作者：
Jiang, X. [1 ]
Snook, K. [1 ]
Cheng, A. [2 ]
Hackenberger, W. S. [1 ]
Geng, X. [3 ]
机构：
[1] TRS Technol Inc, State Coll, PA 16801 USA
[2] Penn State Univ, University Pk, PA 16803 USA
[3] Blatek Inc, State Coll, PA USA
来源：
2008 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-4 AND APPENDIX | 2008年
关键词：
piezoelectric composite; PC-MUT; PMN-PT single crystal; 1-3; composite; ultrasound transducer; micromachining of piezoelectrics;
D O I：
10.1109/ULTSYM.2008.0040
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
In this paper a piezoelectric composite based micromachined ultrasound transducer (PC-MUT) technology is presented for fabrication of PMN-PT single crystal piezoelectric composite transducers. Micromachined PMN-PT single crystal 1-3 composites with resonance frequencies of 15 MHz - 75 MHz were fabricated and characterized with coupling coefficient of 0.67 - 0.79. Transducers with a frequency of 75 MHz were prototyped and characterized.
引用
收藏
页码：164 / +
页数：2
相关论文
共 25 条
  • [1] 60-MHz PMN-PT Single Crystal Transducers for Microfluidic Analysis Systems
    Lau, S. T.
    Zhao, L. B.
    Chan, H. L. W.
    Luo, H. S.
    SENSORS AND ACTUATORS A-PHYSICAL, 2010, 161 (1-2) : 78 - 82
  • [2] 40-MHZ MICROMACHINED PMN-PT COMPOSITE ULTRASOUND ARRAY FOR MEDICAL IMAGING
    Li, Sibo
    Huang, Wenbin
    Chang, Wei-Yi
    Jiang, Xiaoning
    PROCEEDINGS OF THE ASME INTERNATIONAL MECHANICAL ENGINEERING CONGRESS AND EXPOSITION, 2015, VOL 3, 2016,
  • [3] PMN-PT single crystal thick films on silicon substrate for high-frequency micromachined ultrasonic transducers
    Peng, J.
    Lau, S. T.
    Chao, C.
    Dai, J. Y.
    Chan, H. L. W.
    Luo, H. S.
    Zhu, B. P.
    Zhou, Q. F.
    Shung, K. K.
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2010, 98 (01): : 233 - 237
  • [4] PMN-PT single crystal thick films on silicon substrate for high-frequency micromachined ultrasonic transducers
    J. Peng
    S. T. Lau
    C. Chao
    J. Y. Dai
    H. L. W. Chan
    H. S. Luo
    B. P. Zhu
    Q. F. Zhou
    K. K. Shung
    Applied Physics A, 2010, 98
  • [5] PMN-PT single crystal thick films on silicon substrate for high-frequency micromachined ultrasonic transducers
    Peng, Jue
    Lau, Sienting
    Chao, Chen
    Dai, Jiyan
    Chan, Helen L. W.
    Lu, Haosu
    Zhou, Q. F.
    Shung, K. K.
    2008 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-4 AND APPENDIX, 2008, : 161 - +
  • [6] Fabrication of angle beam two-element ultrasonic transducers with PMN-PT single crystal and PMN-PT/epoxy 1-3 composite for NDE applications
    Zhang, Yaoyao
    Wang, Sheng
    Liu, Da'an
    Zhang, Qinhui
    Wang, Wei
    Ren, Bo
    Zhao, Xiangyong
    Luo, Haosu
    SENSORS AND ACTUATORS A-PHYSICAL, 2011, 168 (01) : 223 - 228
  • [7] Fabrication of a 40 MHz single element ultrasonic transducer using a PMN-PT single crystal
    Paeng, Dong-Guk
    Kim, Hyung Ham
    Lee, Sang-Goo
    Rhim, Sung Min
    Choi, Min Joo
    ADVANCED NONDESTRUCTIVE EVALUATION I, PTS 1 AND 2, PROCEEDINGS, 2006, 321-323 : 978 - 983
  • [8] 35MHz PMN-PT Single Crystal Annular Array Ultrasonic Transducer
    Chen, J.
    Lam, K. H.
    Dai, J. Y.
    Zhang, C.
    Zhang, Z. T.
    Feng, G. P.
    INTEGRATED FERROELECTRICS, 2012, 139 (01) : 116 - 122
  • [9] Characterization of PMN-PT piezoelectric single crystal and PMN-PT 1-3 composite at elevated temperatures by electrical impedance resonance analysis
    Wu, Zhengbin
    Xi, Kui
    ULTRASONICS, 2014, 54 (05) : 1318 - 1322
  • [10] Comparison of PMN-PT and PZN-PT Single-Crystal-Based Ultrasonic Transducers for Nondestructive Evaluation Applications
    Kim, Yong-Il
    Kim, Geonwoo
    Bae, Young-Min
    Ryu, Yeon-Hee
    Jeong, Kwang-Ja
    Oh, Chi-Hwan
    Kim, Ki-Bok
    SENSORS AND MATERIALS, 2015, 27 (01) : 107 - 114
123