35MHz PMN-PT Single Crystal Annular Array Ultrasonic Transducer

被引:8
|
作者
Chen, J. [1 ,2 ]
Lam, K. H. [2 ]
Dai, J. Y. [2 ]
Zhang, C. [3 ]
Zhang, Z. T. [3 ]
Feng, G. P. [1 ]
机构
[1] Tsinghua Univ, Dept Precis Instrument & Mech, Beijing 100084, Peoples R China
[2] Hong Kong Polytech Univ, Dept Appl Phys, Hong Kong, Hong Kong, Peoples R China
[3] Tsinghua Univ, Res Inst, Shenzhen Optomechatron Key Lab, Shenzhen 518057, Guangdong, Peoples R China
关键词
PMN-PT; Annular Array; Laser Dicing; High-frequency; HIGH-FREQUENCY ULTRASOUND; FABRICATION; DESIGN; BIOMICROSCOPY; TECHNOLOGY;
D O I
10.1080/10584587.2012.737258
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Lead magnesium niobatelead titanate (PMNPT) single crystal has ultra-high piezoelectric properties compared with conventional piezoelectric materials and is suitable for high-performance ultrasonic transducer application. In this paper, an improved process has been used for fabricating an annular array ultrasonic transducer using PMN-PT single crystal. A 35MHz annular array with 8 elements has been built. The bandwidth of the array elements were around 45%. At the center frequency, the insertion loss ranged from 21dB to 28dB. The electrical cross-talk between the adjacent elements was in a range of 24dB to 31dB.
引用
收藏
页码:116 / 122
页数:7
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