Micromachined PMN-PT Single Crystal Composite Transducers-15-75 MHz PC-MUT

被引：27
|
作者：
Jiang, X. [1 ]
Snook, K. [1 ]
Cheng, A. [2 ]
Hackenberger, W. S. [1 ]
Geng, X. [3 ]
机构：
[1] TRS Technol Inc, State Coll, PA 16801 USA
[2] Penn State Univ, University Pk, PA 16803 USA
[3] Blatek Inc, State Coll, PA USA
来源：
2008 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-4 AND APPENDIX | 2008年
关键词：
piezoelectric composite; PC-MUT; PMN-PT single crystal; 1-3; composite; ultrasound transducer; micromachining of piezoelectrics;
D O I：
10.1109/ULTSYM.2008.0040
中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
In this paper a piezoelectric composite based micromachined ultrasound transducer (PC-MUT) technology is presented for fabrication of PMN-PT single crystal piezoelectric composite transducers. Micromachined PMN-PT single crystal 1-3 composites with resonance frequencies of 15 MHz - 75 MHz were fabricated and characterized with coupling coefficient of 0.67 - 0.79. Transducers with a frequency of 75 MHz were prototyped and characterized.
引用
收藏
页码：164 / +
页数：2
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