Laser and sputter-deposited amorphous films for stress detection

被引:7
|
作者
Meydan, T
Williams, PI
Grigorenko, AN
Nikitin, PI
Perrone, A
Zocco, A
机构
[1] Cardiff Univ, Wolfson Ctr, Sch Engn, Cardiff CF2 3TD, S Glam, Wales
[2] Russian Acad Sci, Inst Gen Phys, Moscow 117942, Russia
[3] Univ Lecce, Ist Nazl Fis Mat, Dipartimento Fis, I-73100 Lecce, Italy
关键词
amorphous magnetic films; laser ablation; stress detection;
D O I
10.1016/S0924-4247(99)00136-3
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Amorphous magnetic films have been deposited onto Kapton(TM) and silicon substrates using the technique of laser ablation. The source material irradiated by the laser was either a pack. of amorphous ribbons of composition Fe67Co18Si1B14 or Fe5.85Co72.15Mo2B15Si5 or a bulk amorphous material with the composition Fe4.35Co68.15Si12.5B15. Results show that all films deposited onto silicon exhibit isotropic magnetisation within the film plane despite being deposited in the presence of an external magnetic field. For those films deposited onto Kapton,both isotropic and anisotropic magnetisation have been observed. Similar compositions deposited by magnetron sputtering have yielded films with in-plane magnetic anisotropy. These films, when subjected to differing fixation pressures within a Kerr magneto-optical installation, show changes in their hysteresis loops. These findings indicate a possible future for these films as sensing elements far stress detection devices. (C) 2000 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:254 / 257
页数:4
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