Contactless probing of high-frequency electrical signals with scanning probe microscopy

被引：0

作者：

Mertin, W ^{[1
]}

机构：

[1] Gerhard Mercator Univ Duisburg, Fac Engn Sci, Inst Mat Elect Engn, D-47048 Duisburg, Germany

来源：

2002 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, VOLS 1-3 | 2002年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Circuit internal test techniques working in a contactless manner are necessary for failure analysis and design verification of high-speed and high-frequency circuits. A relative new technique is the Scanning Probe Voltage Measurement technique, a technique which is based on scanning probe microscopy. This paper gives an overview of the state-of-the-art of this technique and demonstrates some practical examples.

引用

页码：1493 / 1496

页数：4

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