On-Chip Environmental Sensors for Bias Drift Compensation

被引：0

作者：

Guney, Metin G. ^{[1
]}

Chung, Vincent Pey J. ^{[1
]}

Mukherjee, Tamal ^{[1
]}

Fedder, Gary K. ^{[1
,2
]}

机构：

[1] Carnegie Mellon Univ, Dept Elect & Comp Engn, Pittsburgh, PA 15213 USA

[2] Carnegie Mellon Univ, Inst Robot, Pittsburgh, PA 15213 USA

来源：

2017 IEEE SENSORS | 2017年

关键词：

MEMS; CMOS-MEMS; environmental sensors; inertial sensors; drift compensation; ACCELEROMETER;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper reports on the simulation, design and functional verification of high resolution on-chip environmental sensors in a 0.18 mu m CMOS process. The environmental sensors include n-type piezoresistive stress sensors with measured 0.9 kPa normal stress resolution, p-type piezoresistive stress sensors with 4.5 kPa normal stress resolution and Proportional to Absolute Temperature (PTAT) sensors with 6.5 mK resolution. The full accelerometer system on chip integrates a CMOS-MEMS accelerometer array, a pre-amplifier and the sensors. Finite element analysis provides an estimate of the required temperature and stress resolution for stabilizing the accelerometer scale factor up to 1 ppm, which informs the required noise floor for the environmental sensors. Test results from the designed sensors match the expected resolution closely.

引用

页码：564 / 566

页数：3

共 50 条

[31] ON-CHIP ROM CUTS BANDGAP REFERENCE TEMPERATURE DRIFT
VARGHA, D
ELECTRONIC PRODUCT DESIGN, 1994, 15 (12): : 23 - 24
[32] Advances in integrated hollow waveguides for on-chip sensors
Hawkins, Aaron R.
Lunt, Evan J.
Holmes, Matthew R.
Phillips, Brian S.
Yin, Dongliang
Rudenko, Mikhail
Wu, Bin
Schmidt, Holger
MICROMACHINING TECHNOLOGY FOR MICRO-OPTICS AND NANO-OPTICS V AND MICROFABRICATION PROCESS TECHNOLOGY XII, 2007, 6462
[33] Compact On-chip Multiplexed Photonic Gas Sensors
Xia, Zhixuan
Eftekhar, Ali Asghar
Gottfried, David S.
Li, Qing
Adibi, Ali
2013 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO), 2013,
[34] On-chip infrared sensors: redefining the benefits of scaling
Kita, Derek
Lin, Hongtao
Agarwal, Anu
Yadav, Anupama
Richardson, Kathleen
Luzinov, Igor
Gu, Tian
Hu, Juejun
FRONTIERS IN BIOLOGICAL DETECTION: FROM NANOSENSORS TO SYSTEMS IX, 2017, 10081
[35] On-chip squeezed light could improve sensors
不详
PHOTONICS SPECTRA, 2013, 47 (10) : 23 - 24
[36] Fully On-Chip Temperature, Process, and Voltage Sensors
Chen, Shi-Wen
Chang, Ming-Hung
Hsieh, Wei-Chih
Hwang, Wei
2010 IEEE INTERNATIONAL SYMPOSIUM ON CIRCUITS AND SYSTEMS, 2010, : 897 - 900
[37] Toward On-Chip Mid-Infrared Sensors
Sieger, Markus
Mizaikoff, Boris
ANALYTICAL CHEMISTRY, 2016, 88 (11) : 5562 - 5573
[38] Compensation for the drift-like terms caused by environmental fluctuations in the responses of chemoresistive gas sensors
Hossein-Babaei, F.
Ghafarinia, V.
SENSORS AND ACTUATORS B-CHEMICAL, 2010, 143 (02): : 641 - 648
[39] Various On-Chip Sensors with Microfluidics for Biological Applications
Lee, Hun
Xu, Linfeng
Koh, Domin
Nyayapathi, Nikhila
Oh, Kwang W.
SENSORS, 2014, 14 (09): : 17008 - 17036
[40] ON-CHIP ANTENNA STRUCTURES FOR BIOMEDICAL IMPLANTABLE SENSORS
Aquilino, F.
Della Corte, F. G.
PROCEEDINGS OF THE 13TH ITALIAN CONFERENCE ON SENSORS AND MICROSYSTEMS, 2009, : 255 - 258

← 1 2 3 4 5 →