High cooling power density of SiGe/Si supertattice microcoolers

被引：0

作者：

Zeng, GH ^{[1
]}

Fan, XF ^{[1
]}

LaBounty, C ^{[1
]}

Bowers, JE ^{[1
]}

Croke, E ^{[1
]}

Christofferson, J ^{[1
]}

Vashaee, D ^{[1
]}

Zhang, Y ^{[1
]}

Shakouri, A ^{[1
]}

机构：

[1] Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA

来源：

THERMOELECTRIC MATERIALS 2001-RESEARCH AND APPLICATIONS | 2001年 / 691卷

关键词：

D O I：

暂无

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Fabrication and characterization of SiGe/Si superlattice microcoolers integrated with thin film resistors are described. Superlattice structures were used to enhance the device performance by reducing the thermal conductivity, and by providing selective emission of hot carriers through thermionic emission. Thin film metal resistors were integrated on top of the cooler devices and they were used as heat load for cooling power density measurement. Various device sizes were characterized. Net cooling over 4.1 K and a cooling power density of 598 W/cm(2) for 40 x 40 mum(2) devices were measured at room temperature.

引用

页码：147 / 152

页数：6

共 50 条

[21] DYNAMIC CHARACTERIZATION OF SI/SIGE POWER HBTS
ERBEN, U
GRUHLE, A
SCHUPPEN, A
KIBBEL, H
KOENIG, U
[J]. ELECTRONICS LETTERS, 1994, 30 (06) : 525 - 527
[22] Cooling Jacket for High Power Density Segmented Electric Motor
Yao, Zhaoxi
Mandel, Raphael Kahat
McCluskey, F. Patrick
[J]. 2022 IEEE Transportation Electrification Conference and Expo, ITEC 2022, 2022, : 1082 - 1086
[23] Cooling Jacket for High Power Density Segmented Electric Motor
Yao, Zhaoxi
Mandel, Raphael Kahat
McCluskey, F. Patrick
[J]. 2022 IEEE/AIAA TRANSPORTATION ELECTRIFICATION CONFERENCE AND ELECTRIC AIRCRAFT TECHNOLOGIES SYMPOSIUM (ITEC+EATS 2022), 2022, : 1082 - 1086
[24] A novel integrated cooling packaging for high power density semiconductors
Al-Hinaai, Amin Salim Obaid
Huesgen, Till
Buttay, Cyril
Zeitler, Richard
Meyer, Daniela
[J]. 2022 28TH INTERNATIONAL WORKSHOP ON THERMAL INVESTIGATIONS OF ICS AND SYSTEMS (THERMINIC 2022), 2022,
[25] High performance Si/SiGe heterostructure MOSFETs for low power analog circuit applications
Li, PW
Liao, WM
Shih, CC
Kuo, TS
Lai, LS
Tseng, YT
Tsai, MJ
[J]. SOLID-STATE ELECTRONICS, 2003, 47 (06) : 1095 - 1098
[26] Selective amorphization of SiGe in Si/SiGe nanostructures via high energy Si plus implant
Turner, Emily M.
Campbell, Quinn
Avci, Ibrahim
Weber, William J.
Lu, Ping
Wang, George T.
Jones, Kevin S.
[J]. JOURNAL OF APPLIED PHYSICS, 2022, 132 (03)
[27] Selective amorphization of SiGe in Si/SiGe nanostructures via high energy Si+ implant
Turner, Emily M.
Campbell, Quinn
Avci, Ibrahim
Weber, William J.
Lu, Ping
Wang, George T.
Jones, Kevin S.
[J]. Journal of Applied Physics, 2022, 132 (03):
[28] Winding Embedded Liquid Cooling for High Power Density Slotless Motor
Chattopadhyay, Ritvik
Islam, Md Sariful
Mikail, Rajib
Husain, Iqbal
[J]. 2020 IEEE ENERGY CONVERSION CONGRESS AND EXPOSITION (ECCE), 2020, : 1083 - 1088
[29] An evaluation of SiGe/si HBT high efficiency power amplifiers for wide dynamic power control range application
Lin, CC
Yeh, PC
Chiou, HK
[J]. PROCEEDINGS OF THE 2004 IEEE ASIA-PACIFIC CONFERENCE ON CIRCUITS AND SYSTEMS, VOL 1 AND 2: SOC DESIGN FOR UBIQUITOUS INFORMATION TECHNOLOGY, 2004, : 281 - 284
[30] Cooling Technologies for High Power Density Electrical Machines for Aviation Applications
Canders, Wolf-Ruediger
Mann, Jan Hoff
Henke, Markus
[J]. ENERGIES, 2019, 12 (23)

← 1 2 3 4 5 →