Integrated of PDMS Microfluidic Channel with cantilever based bio-sensor

被引：0
|
作者：
Wang, Shuaipeng [1 ,2 ]
Chen, Yanning [1 ,2 ]
Zhang, Haifeng [1 ,2 ]
Zhao, Dongyan [1 ,2 ]
机构：
[1] Beijing Smart Chip Microelect Technol Co Ltd, State Grid Key Lab Power Ind Chip Design & Anal T, 15 Xiaoying Rd E, Beijing, Peoples R China
[2] Beijing Smart Chip Microelect Technol Co Ltd, Beijing Engn Res Ctr High Reliabil IC Power Ind G, 15 Xiaoying Rd E, Beijing, Peoples R China
来源：
2016 17TH INTERNATIONAL CONFERENCE ON ELECTRONIC PACKAGING TECHNOLOGY (ICEPT) | 2016年
关键词：
MEMS; cantilever; PDMS; bio-sensor;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A novel cantilever array sensor was microfabricated for precise bio-marker detection. The device was fabricated on a SOl wafer with CMOS compatible processes. In order to reducing the effect of k variation due to adsorption, a local biochemical reaction cavity was designed in the free end of the cantilever, the antibody-immobilization was performed in this local area by micro printing technology. This approach can be applied to enhance the performance of all the cantilever-based sensors. The PDMS package is designed to be used for the cantilever sensor which is greatly promoting the practicality of the sensor.
引用
收藏
页码：1189 / 1191
页数：3
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