A Flexible Humidity Sensor Based on Co3O4 Nanoneedles with High Sensitivity and Quick Response

被引:2
|
作者
Qi, Qi [1 ]
Wang, Qi [1 ]
Liu, Nanliu [1 ]
Zheng, Xiaoping [1 ]
Ding, Xiongjie [1 ]
Liang, Zhiwen [1 ]
Wang, Qing [1 ]
Zhang, Guoyi [1 ]
机构
[1] Peking Univ, Dongguan Inst Optoelect, Dongguan 523808, Peoples R China
基金
国家重点研发计划;
关键词
Co3O4; Nanostructures; Humidity Sensors; Flexible Sensors; Chemical Sensors;
D O I
10.1166/jno.2020.2788
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A flexible humidity sensor has been realized based on Co3O4 nanoneedles via a deposition technique. High humidity sensing and excellent flexible properties are observed in the tests. The impedance of the as-prepared sensor decreases by nearly three orders of magnitude with increasing relative humidity (RH) from 11% to 95% on a semilogarithmic scale. The response and recovery times are about 3 and 6 s respectively. The maximum hysteresis is less than 4% under 80% RH. No obvious changes for the sensing performance can be obtained after 100 bending/extending cycles and bending tests. These performances make the current sensor a good candidate for flexible humidity detection.
引用
收藏
页码:870 / 874
页数:5
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